主要技术指标:Front pneumatically locking sliding door for easy source and substrate access Motorised substrate rotation Full computer control with recipe functions Optional Datalogging 1 x 10-7 mbar base pressure Pneumatic source and substrate shutters Uniformity +/- 5% for all sources
功能/应用范围:Mini-SPECTROS SPECTROS 100/150 Super-SPECTROS 150/200
主要测试和研究领域:电子/信息技术
仪器负责人:方鸣佳
电话:51355288
电子邮件:sme@fudan.edu.cn